| Translation (XY) | 100 ± 10% μm |
| Translation (Z) | 100 ± 10% μm |
| Voltage Range | -15 V to +150 V |
| Resonance Frequency, Unloaded X-Axis | 350 ± 20% Hz |
| Resonance Frequency, Unloaded Y-Axis | 250 ± 20% Hz |
| Resonance Frequency, Unloaded Z-Axis | 1000 ± 20% Hz |
| Stiffness | 1.0 ± 20% N/μm |
| Maximum Load (hor/vert) | 0.5 / 0.25 kg |
| Mass | 1000 g |
| Cable Length | 180 cm |
| Cable Connection | DB-9 |